Sub nm-Resolution Static Measurement with MEMS Displacement Sensors
نویسندگان
چکیده
منابع مشابه
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[*] K.-H. Kim, Dr. N. Moldovan, Prof. H. D. Espinosa Department of Mechanical Engineering Northwestern University 2145 Sheridan Rd., Evanston, IL 60208-3111 (USA) Fax: (+1)847-491-3915 E-mail: [email protected] [**] This work was supported primarily by the Nanoscale Science and Engineering Initiative of the National Science Foundation under NSF Award Number EEC-0118025. We thank Prof. C...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2011
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2011.12.147